SESHA 2018 Symposium Abstract

Perspectives on Point of Use Abatement Measurements

Alex Bellon; Steve Hall; Bryan Benaway
(Spectrum Environmental Solutions)

Having a well-developed POU monitoring plan can bring significant value to a FAB form both an environmental and monetary perspective. POUs are notoriously difficult to maintain in optimal working order and often are not verified for GHG DRE or combustion byproduct emissions during normal operation. POU effluent gas analysis by Fourier transform infrared (FTIR) is an easy way to monitor in real time for GHGs and criteria pollutants without interrupting wafer processing. This presentation details a few of the sampling techniques that can lead to more efficient operation of and lower emissions from POUs.