SESHA 2018 Symposium Abstract

Materials outgassing as part of process hazard assessment

Alain Pardon

Imecís core activity is to develop new processes for semiconductor manufacturing. This involves using novel process equipment but also new materials that can fulfill the demands of future technology nodes. In the past the focus of the risk assessment was on the process (process hazard assessment) to identify the hazards of the materials used but also to identify the reactive and hazardous byproducts of the process. In advanced processing not only equipment and chemistry should be the focus of sound risk assessment. Some materials (selenides, phosphides, .. ) formed in the layers tend to outgas when exposed to ambient air. This presentation will illustrate process hazard assessment and give some insight in how risks of material outgassing are assessed and managed.