SESHA 2018 Symposium Abstract

FCs Emission Factor and Next Steps Reduction emission for Taiwan’s Industry

Joey Lu; Daphne Cheng ; Chun Yu Chen
(Industrial Technology Research Institute (ITRI))

Fluorinated Compounds (FCs) have the highest Global Warming Potential of all greenhouse gases identified to date by the Intergovernmental Panel on Climate Change (IPCC); their atmospheric lifetime is estimated to be 3,200 years. Several FCs used in electronics manufacturing including SF6, perfluorocarbons (PFCs), hydrofluorocarbons (HFCs) and heat transfer fluids (HTFs) are extremely potent greenhouse gases. Semiconductor and Panel Display manufacturing are the two most significant sources of FC emissions where these gases are used for equipment cleaning and plasma etching in Taiwan. The two industries have their own association in Taiwan, TSIA and TTLA. The two associations have joined with WSC and WDICC to reduce FC emissions. They reached their target 1st stage before 2010. However, their FCs gas emissions are still high and have to be greatly reduced. The two associations have to make some effort to face these difficult challenges. In this paper, the authors focus specifically on FC usage and emission factors outlining the next steps and how they are preparing plans to meet new targets under regulatory requirements and extending their environmental protections.